Octadecyltrichlorosilane

Octadecyltrichlorosilane (ODTS, or n-octadecyltrichlorosilane) is an organometallic chemical. It is used in semiconductor industry to form self-assembled monolayer thin films on silicon dioxide substrates. Its structural chemical formula is CH3(CH2)17SiCl3. It is flammable, reacts with water, and is also sensitive to air. It is corrosive and can severely damage mucous membranes. Its EINECS number is 203-930-7.

Octadecyltrichlorosilane
Names
IUPAC name
n-Octadecyltrichlorosilane
Other names
Trichlorooctadecylsilane
Stearyltrichlorosilane
Identifiers
CAS Number
3D model (JSmol)
Abbreviations ODTS
ChemSpider
ECHA InfoCard 100.003.573
EC Number
  • 203-930-7
PubChem CID
UNII
CompTox Dashboard (EPA)
Properties
Chemical formula
C18H37Cl3Si
Molar mass 387.93 g·mol−1
Appearance Colorless liquid
Density 0.984 g/mL, liquid
Boiling point 223 °C (433 °F; 496 K) at 10 Torr
Solubility soluble in ether, THF, THP, hydrocarbons, tetrachloroethylene[1]
Hazards
Main hazards flammable, corrosive
EU classification (DSD) (outdated)
Corrosive (C)
S-phrases (outdated) S26 S27 S36 S37 S39
NFPA 704 (fire diamond)
2
3
2
Related compounds
Dodecyltrichlorosilane
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Infobox references

Octadecyltrichlorosilane is an amphiphilic molecule consisting of a long-chain alkyl group (C18H37) and a polar head group (SiCl3), which forms Self assembled monolayers (SAMs) on various oxidic substrates.[2]

ODTS finds its use in molecular electronics, as thin insulating gates in Metal-Insulator-Semiconductor Field-Effect Transistors.[3]

Dodecyltrichlorosilane, an ODTS analog with shorter alkyl chain, is used for the same purpose as well.

ODTS-PVP films are used in organic-substrate LCD displays.[4]

References

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